Run2Run
R2R Metal Wafetr Temperature Data from TEEMAP-XV
TEEMAP-2D
Two-Dimensional TEEMAP Data
TEEMAP is a family of advanced on-tool temperature monitors designed with semiconductor applications in mind. Depending on the process location, sample type and process temperature range, there is a TEEMAP solution that can offer real-time, R2R temperature infromation for critical processes of interest.

In comparison to other radiometry sensors used for general temperature monitoring, TEEMAP is 100% designed and engineered for semiconductor manufacturing processes whereas stringent data reliability and reproducibility is critical. TEEMAP can help Fabs and OEMs to achieve higher productivity by offering 24/7 temperature monitoring on 100% of the products.